The JEM-3100F field emission transmission electron microscope has a resolution of 0.17 nm, the best available for this class of microscope. The high resolution of the JEM-3100F is especially effective in the testing of nano technology materials. The control system uses state-of-the-art digital technology, and substantially enhances ease of operation.
With an accelerating voltage of 300 kV, the JEM-3100F is suitable for process testing, and is capable of inspecting relatively thick semiconductor devices sectioned by a focused ion beam at high throughput.
The JEM-3100F is an indispensable tool in a wide range of applications from research and development to manufacturing; including biology, basic materials research and development, failure analysis, and quality control.
Resolution of 0.17 nm, the best available for this class of microscope
High brightness, high stability Schottky electron gun ideal for analysis
New 5 axis motor drive goniometer for enhanced stage accuracy
Fully digitized control for ease of operation
Upgraded to support micro area elemental analysis when JEOL’s scanning transmission electron microscope (STEM) system and an energy dispersive X-ray analyzer (EDS) are incorporated