Magellan XHR Scanning Electron Microscope from FEI

The Magellan™ XHR SEM family of scanning electron microscopes (SEM) enables scientists and engineers to quickly see things they could not see before: highly-sensitive surface images, looking top-down or at an angle, and at resolutions below one nanometer. This important breakthrough in electron microscopy is made possible thanks to the revolutionary monochromatized gun of the Magellan™ XHR SEM column, which enables microscopists to associate high spatial resolution with very shallow beam penetration. The Magellan™ XHR SEM family of scanning electron microscopes (SEM) extends the range and capabilities of traditional nanoscale SEM imaging and analysis with the speed and ease-of-use of a traditional scanning electron microscope (SEM), with no restriction to sample size.

Advantages and Capabilities

Sub-nanometer resolution across the 1 to 30kV range has critical value in scientific research and industrial R&D. In addition, it is an absolute requirement in process development, monitoring and control applications in advanced semiconductor manufacturing and the electronics industry. The Magellan™ XHR SEM family of microscopes extends this capability to applications that were previously impossible or impractical with conventional scanning electron microscopes (SEM), transmission electron microscopes (TEM) or focused ion beam (FIB) systems.

The Magellan™ XHR SEM family's superior performance is derived from the integration of new electron optical elements, proprietary electron gun technology, a highly accurate five-axis piezo-ceramic stage, a high stability platform with fully configurable analytical chamber and a fully integrated sample cleanliness management. The stage readily accommodates large samples or multiple smaller samples, while providing fast, accurate navigation and unequaled stability.

Featured Instruments of the Magellan™ XHR SEM Family

The Magellan Family is available in two models: The Magellan™ XHR SEM 400, which is optimized for scientific research, and the Magellan™ XHR SEM 400L, engineered for semiconductor labs and other electronics applications. The Magellan™ XHR SEM 400L comes with an automated loadlock that speeds-up sample throughput, and includes a retractable solid state backscatter electron detector (SSBSED) and S2 compliance kit, all standard equipment. Both models remain highly configurable with more detectors (STEM, EDS and more), a cryostage, specialized holders and many more. An optional full environmental enclosure can be added to isolate the instrument from thermal and acoustic interferences, ensuring peak performance while relaxing site requirements and facility preparation costs.

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