Faster Analysis of Samples with the Phenom Pharos Desktop SEM

The Thermo Scientific^TM Phenom Pharos, which is a desktop SEM, is equipped with a FEG source that generates images that are extremely bright and crisp. It allows all the users to be benefited from the advantages of a FEG source. Its compact and intuitive design enables it to be easily operated, from the initial installation through to the actual usage.

The sophisticated hardware design and detectors facilitate a fast time to image and unfailing, easy handling.

Specifications

	Phenom Pharos Desktop SEM	Phenom XL Desktop SEM	Phenom ProX Desktop SEM
Light optical magnification	20– 134x	3 - 16x	20 - 134x
Electron optical magnification range	200– 1,000,000x	80 - 100,000x	80 - 150,000x
Resolution	4 nm (BSD) & 3 nm (SED)	< 14 nm	< 10 nm (BSED) & < 8 nm (SED)
Digital zoom	Max. 12x	Max. 12x	Max. 12x
Light optical navigation camera	Color	Color	Color
Acceleration voltages	Default: 5 kV, 10 kV and 15 kV Advanced mode: adjustable range between 2 kV and 15 kV	Default: 5 kV, 10 kV and 15 kV Advanced mode: adjustable range between 4.8 kV and 20.5 kV imaging and analysis mode Secondary Electron Detector	Default: 5 kV, 10 kV and 15 kV Advanced mode: adjustable range between 4.8 kV and 15 kV imaging and analysis mode
Vacuum modes	• Charge reduction mode (low vacuum mode) • High vacuum mode • Medium vacuum mode	• Charge reduction mode (low vacuum mode) • High vacuum mode • Medium vacuum mode	• Charge reduction mode (low vacuum mode) • High vacuum mode
Detector	• BSD • EDS (optional) • SED (optional)	• BSD • EDS (optional) • SED (optional)	• BSD • EDS • SED (optional)
Sample size	• Up to 32 mm (Ø)	• Max. 100 mm x 100 mm • Up to 36 x 12 mm pin stubs	• Up to 32 mm (Ø)
Sample height	Up to 100 mm (h)	Max. 65 mm	Up to 100 mm (h)