The Supercritical Automegasamdri®-915B, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.
Smooth operation and precise control are the Supercritical Automegasamdri®-915B´s trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 6", 4", 3", 2" wafers or 10mm square die per process run!
Features
- Clean room static-free compatible design.
- Microprocessor controller allows for complete automatic processing.
- All internal surfaces are inert to CO2 and ultra pure alcohols.
- Repeatable operating parameters insuring reproducibility of results.
- LED's instantly indicate process mode at a glance.
- Integrated temperature controls.
- Processes up to 5 x 6" diam. wafers per run; comes with additional HF compatible wafer holders to process 5 x 4", 5 x 3", 5 x 2" diameter wafers or 5 x 10mm square die (Tousimis HF compatible Wafer Holders can be used to transport and process your wafers and die from HF).
- All electronic components meet CE, UL and/or U.S. Military Specifications.
- Internal rupture disc built in for safety.
- Static pressure control module pre-set for automatic safe pressure stability.
- An efficient adiabatic cooling system, capable of cooling the chamber from ambient room temperature to near 0°C, in less than 3 minutes, maintains temperature automatically during both FILL and PURGE modes.
- For added safety and convenience, U.S. Patented SOTER™ Condenser quietly captures exhaust and alcohols.
- Under-lit chamber with viewing window facilitates operator chamber status viewing.
- 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber.
- Unique chamber inserts allow variance of chamber I.D. This maximizes efficiency in LCO2 consumption and processing time.