Piezoelectric vibration cancellation with the SEM-Base VI

SEM-Base® VI from TMC Ametek, is the next generation in STACIS active piezoelectric vibration cancellation. SEM-Base VI has been developed to aid all commercial Scanning Electron Microscopes (SEMs), as well as several Small Dual Beam and Focused Ion Beam (FIB) instruments.

SEM-Base VI offers enhanced vibration isolation performance, a quicker more robust controller, and a sophisticated graphical user interface (GUI). SEM-Base VI will allow more laboratories and facilities to obtain the level of floor vibration needed to fulfill the specifications of the tool manufacturer.

SEM-Base VI utilizes a special “serial architecture” in which the vibration sensors tend to quantify floor vibration, instead of payload vibration. This guarantees that, contrary to other designs, payload resonances do not innately restrict vibration isolation or result in instability.

The vibration sensors are known to be low-frequency inertial velocity sensors that are utilized for utmost sensitivity in the difficult-to-measure sub-Hz range. Once integrated with the special piezo-actuator technology, SEM-Base VI obtains extremely high levels of vibration cancellation, even on floors that are already quiet.

On average, SEM-Base VI offers 6 dB more vibration isolation compared to earlier models. TMC’s next-generation controller, the DC-2020, also features a new dual-core processor and offers tool owners and scientists a highly simple and user-friendly graphical interface for quick system evaluation and operational peace of mind.

While connecting over Ethernet, the DC-2020 makes the SEM-Base GUI in the user’s browser with no extra software or application program to install. Instead, the user could interface with the controller through an onboard menu-driven Liquid Crystal Display (LCD).

The SEM-Base VI advantage

  • Hard-mount technology – SEM-Base VI is consistent with all internal SEM vibration control systems and aggressively reduces low-frequency floor vibration starting at 0.6 Hz.
  • Active inertial vibration cancellation – SEM-Base VI utilizes low-frequency, high sensitivity inertial velocity sensors to obtain high levels of vibration attenuation, even on quiet floors.
  • Serial design with piezoelectric technology – The special serial design and proprietary highforce piezoelectric technology leads to an extensive active bandwidth from 0.6 Hz to 150 Hz and matchless, inertial active vibration cancellation with a 90% decrease starting at 2 Hz.

Specifications

Performance specifications

Table 1. Source: TMC Vibration Control

. .
Active degrees of freedom 6
Active bandwidth 0.6 Hz - 100 Hz
Passive natural frequency 12 Hz nominal
Effective active resonant frequency 0.5 Hz
Isolation at 1 Hz 40% - 70%
Isolation at 2 Hz 90%
Isolation at ≥3 Hz 90-98%
Internal noise <0.1 nm RMS
Operating load range Standard capacity: 900 - 2,500 lbs (408 - 1134 kg)
High capacity: 2,500 - 3,200 lbs (1134 - 1452 kg)
Magnetic field emitted at maximum 4 in.(102 mm) from the platform <0.02 µG broadband RMS

 

Design, dimensions and environmental and utility requirements

Table 2. Source: TMC Vibration Control

. .
Environmental and safety CE and RoHS compliant
Active isolation elements Piezoelectric actuators with minimum 3300 lb. (1500 kg) capacity receive signal from a high-voltage amplifier with an output of up to 800 VDC. Vertical actuators support the isolated payload.
Passive isolation element single stiff elastomer (no compressed air supply required)
Vibration sensor elements downward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion
Active feedback control loop Floor vibration is measured, processed and attenuated below the spring supporting the isolated surface
Dimensions (WxD) 35.25 x 44.25 in.
895 x 1124 mm
Height 6.3 in. (160 mm) nominal,
doesn't change when SEM-Base is switched off
Operating temperature 50° - 90° F
10° - 32° C
Storage temperature -40° - 130° F
-40° - 55° C
Humidity < 80% @ 68° F | 20° C, Maximum dewpoint 18 degrees C
System power requirements 100, 120, 230, 240 VAC
50/60 Hz AC; <600 W
CE compliant
Floor displacement <800 µin. (20 µm) below 10 Hz

 

Built-in controller specifications

Table 3. Source: TMC Vibration Control

. .
Processor 150/75 MHz dual core
Sampling rate 10 kHz
Analog outputs 16 channels
Analog inputs 16 channels
Status light single LED
Front panel ports 1x serial USB 2.0
1x serial Micro-USB
1x Ethernet RJ-45
2x BNC
User interface Front panel LCD display
haracter menu on HyperTerminal
Extended GUI for Microsoft Windows
mbedded Ethernet GUI

 

Piezoelectric vibration cancellation with the SEM-Base VI

Image Credit: TMC Vibration Control

Performance

1800 lbs (818 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS).

1800 lbs (818 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS). Image Credit: TMC Vibration Control

Application photos

Piezoelectric vibration cancellation with the SEM-Base VI

Image Credit: TMC Vibration Control

Piezoelectric vibration cancellation with the SEM-Base VI

Image Credit: TMC Vibration Control

Piezoelectric vibration cancellation with the SEM-Base VI

Image Credit: TMC Vibration Control

Piezoelectric vibration cancellation with the SEM-Base VI

Image Credit: TMC Vibration Control

Piezoelectric vibration cancellation with the SEM-Base VI

Image Credit: TMC Vibration Control

Piezoelectric vibration cancellation with the SEM-Base VI

Image Credit: TMC Vibration Control

Piezoelectric vibration cancellation with the SEM-Base VI

Image Credit: TMC Vibration Control

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