The 108 Auto Sputter Coater is ideal for the high-quality coating of non-conducting samples for standard SEM imaging.
The 108 Auto Sputter Coater with Ø120 mm Chamber. Image Credit: Ted Pella, Inc
The extra functionality of the automatic features allows fine-grain coating on a range of samples with a choice of target materials.
The automatic purge and leak functions with the optional MTM-20 High Resolution Thickness Controller provide constant thickness for improved conductive coating outcomes. Cool and fine-grain sputtering has been obtained with a highly efficient low-voltage DC magnetron head. The rapid change target method enables a range of metals to be utilized.
Main features
- The 108 Auto Sputter Coater is available in a completely automated or manually operated option. The specifications consist of an automatic vent and argon purge control.
- The digital sputter current control is independent of the argon gas pressure in the sputtering chamber to obtain constant sputtering rates and ideal specimen coverage.
- In automatic mode, it is possible to regulate the coater in two ways. The digital timer could provide repeatable coatings, or the MTM-20 High Resolution Thickness Controller (optional) could stop the sputtering process at the preferred thickness. Instead, the MTM-10 High Resolution Thickness Monitor (optional) might also be utilized for manual termination.
- The 108 Auto Sputter Coater could be factory fitted or retrofitted at any time with the MTM-20 High Resolution Thickness Controller (optional).
- The novel magnetron design provides wide-angle coverage at close sample distances, even for sensitive samples.
- The effective DC magnetron functions on a low voltage for “ultra-cool” sputtering to prevent effects on sample surface.
- Quick target change enables a range of materials utilized: Au, Au/Pd, Pt/Pd Pt, (Au fitted as standard).
- Separate electronic valves available for purge and vent, leak, coupled with an accurate needle valve, guarantee simple and rapid operation.
- Also, the optional Rotary-Tilting (RT) Stage comes for the 108 Auto Sputter Coater.
Sputter Head. Image Credit: Ted Pella, Inc
Standard Ø63 mm Stage. Image Credit: Ted Pella, Inc
The 108 Auto consists of a 120 mm outer diameter chamber. For a bigger chamber system, the 108 Auto/SE is available. This system consists of a bigger 150 mm outer diameter chamber and consists of the option of adding the Rotary-Planetary-Tilting or Rotary-Tilting Stages.
Image Credit: Ted Pella, Inc