The Supercritical Autosamdri®-815, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.
Smooth operation and precise control are the Supercritical Autosamdri®-815's trademark; allowing anti-stiction processing of 10mm square die as well as 1" wafers.
Features
- Microprocessor controller allows for complete automatic processing.
- Electromagnetic valves and seals inert to LCO2, alcohols and acetone.
- Internal surfaces inert to CO2, ultra pure alcohols and acetone.
- Repeatable operating parameters insuring reproducibility of results.
- Process up to 5 x 10mm square die or 5 x 1" diameter wafers with every run! (Tousimis HF compatible Wafer/Die Holders are used to transport and process your MEMS devices minimizing handling).
- Integrated temperature controls.
- Internal rupture disc built in for safety.
- LED's instantly indicate process mode at a glance.
- Clean room static-free compatible design.
- Complete advanced solid state reliable electronics.
- Efficient adiabatic cooling system; cool Process Chamber from room temperature to operational temperature in less than 90 seconds!
- All electronic components meet CE, UL and/or U.S. Military Specifications.
- Static pressure control module pre-set for automatic safe pressure stability.
- 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber.
- Under-lit chamber with viewing window facilitates operator chamber status viewing.
- Vernier Handle Meter Valves allow for repeatable precision flow control.
- SOTER™ Condenser connects to Autosamdri®-815, Series B (SOTER™ Condenser quietly separates waste alcohol from exhaust CO2).