The Supercritical Autosamdri®-815, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.

Smooth operation and precise control are the Supercritical Autosamdri®-815's trademark; allowing anti-stiction processing of 10mm square die as well as 1" wafers.


  • Microprocessor controller allows for complete automatic processing.
  • Electromagnetic valves and seals inert to LCO2, alcohols and acetone.
  • Internal surfaces inert to CO2, ultra pure alcohols and acetone.
  • Repeatable operating parameters insuring reproducibility of results.
  • Process up to 5 x 10mm square die or 5 x 1" diameter wafers with every run! (Tousimis HF compatible Wafer/Die Holders are used to transport and process your MEMS devices minimizing handling).
  • Integrated temperature controls.
  • Internal rupture disc built in for safety.
  • LED's instantly indicate process mode at a glance.
  • Clean room static-free compatible design.
  • Complete advanced solid state reliable electronics.
  • Efficient adiabatic cooling system; cool Process Chamber from room temperature to operational temperature in less than 90 seconds!
  • All electronic components meet CE, UL and/or U.S. Military Specifications.
  • Static pressure control module pre-set for automatic safe pressure stability.
  • 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber.
  • Under-lit chamber with viewing window facilitates operator chamber status viewing.
  • Vernier Handle Meter Valves allow for repeatable precision flow control.
  • SOTER™ Condenser connects to Autosamdri®-815, Series B (SOTER™ Condenser quietly separates waste alcohol from exhaust CO2).