The Supercritical Autosamdri®-815B, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.

Smooth operation and precise control are the Supercritical Autosamdri®-815B´s trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 4", 3", 2" wafers or 10mm square die per process run!


  • Microprocessor controller allows for complete automatic processing.
  • All internal surfaces are inert to CO2 and ultra pure alcohols.
  • Repeatable operating parameters insuring reproducibility of results.
  • Integrated temperature controls.
  • Internal rupture disc built in for safety.
  • Processes up to 5 x 4" diam. wafers per run; comes with additional HF compatible wafer holders to process 5 x 3", 5 x 2" diameter wafers or 5 x 10mm square die (Tousimis HF compatible Wafer Holders can be used to transport and process your wafers and die from HF).
  • All electronic components meet CE, UL and/or U.S. Military Specifications.
  • Static pressure control module pre-set for automatic safe pressure stability.
  • 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber.
  • Under-lit chamber with viewing window facilitates operator chamber status viewing.
  • An efficient adiabatic cooling system, capable of cooling the chamber from ambient room temperature to near 0°C, in less than 3 minutes and maintains temperature automatically during both FILL and PURGE modes.
  • LED's instantly indicate process mode at a glance.
  • Clean room static-free compatible design.
  • For added safety and convenience, the U.S. Patented SOTER™ condenser quietly captures exhaust and alcohols.
  • Unique chamber inserts allow variance of chamber I.D. This maximizes efficiency in LCO2 consumption and processing time.