The 108 Auto/SE Sputter Coater is the Special Equipment version of the 108 Auto Sputter Coater. The 108 Auto/SE has been planned for use in applications where the coating thickness should have a very high degree of uniformity.
The 108 Auto/SE Sputter Coater with Ø150 mm Chamber. Image Credit: Ted Pella, Inc
In comparison to the 108 Auto, the chamber size has been increased to around 150 mm outer diameter to house the optional Rotary-Planetary-Tilting Stage or Rotary-Tilting Stage.
The 9524 Rotary-Planetary-Tilting RPT Stage Shown with optional MTM Crystal Monitor from Ted Pella, Inc.
Optional Rotary-Planetary-Tilting (RPT) Stage (#9524) demonstrating variable speed settings and adjustable tilt. Shown with MTM crystal monitor installed, also optional. Video Credit: Ted Pella, Inc
Optional Rotary-Tilting (RT) Stage (#9660). Image Credit: Ted Pella, Inc
Also, the 108 Auto/SE Sputter Coater could be fitted with an optional MTM-10 or MTM-20 Thickness Measurement System.
108 Auto/SE Sputter Coater with MTM-20 High Resolution Thickness Controller and RPT Stage. Image Credit: Ted Pella, Inc