MultiGas 2032 Purity FTIR Gas Analyzer from MKS Instruments

The MultiGas Purity Analyzer is an FTIR Spectroscopy based gas analyzer capable of ppb contaminant detection in high purity bulk process gases such as NH3 (Ammonia), NF3, SiF4, and H2. The MultiGas Purity Analyzer is composed of a process FTIR Spectrometer, high-optical-throughput internally polished sampling cell, and applications-specific gas analysis software. These integrated components, along with automated bake-out functionality, provide unmatched precision and accuracy for bulk gas contaminant monitoring.

Features and Benefits

  • Real-time, on-line purity analysis of bulk process gas,
  • Trace ppb level impurity detection in bulk process gases such as NH3, NF3, SiF4, and H2,
  • Gas cell constructed to handle high purity corrosive gases,
  • Specialized automatic zeroing and self-calibration software.


Continuous monitoring of trace contaminants in high purity bulk gases in production environments, including:

  • H2O, CO, CO2, N2O and CH4 in NH3,
  • H2O, CO, CO2, N2O CH4, HF in NF3,
  • H2O, CO, CO2, N2O CH4, HF, HCl, NH3, CH2Cl2, CHCl3 in H2,
  • H2O, CO, CO2, CH4, and NH3 in N2O.